MEMS Materials and Processes Handbook. Reza Ghodssi, Pinyen Lin

MEMS Materials and Processes Handbook



Download MEMS Materials and Processes Handbook



MEMS Materials and Processes Handbook Reza Ghodssi, Pinyen Lin ebook pdf
Publisher: Springer
Language: English
Page: 1224
ISBN: 0387473165, 9780387473161

Review

From the reviews: “In this handbook, editors Ghodssi (Univ. of Maryland, College Park) and Lin (Touch Micro-system Technology, Taiwan) have essentially organized the collective knowledge of decades of MEMS research from around the world into one book. … This volume is not designed as a textbook, but instead as a reference, and is extremely useful for MEMS inventors. Summing Up: Highly recommended. Graduate students, researchers/faculty, and professionals.” (N. M. Fahrenkopf, Choice, Vol. 49 (2), October, 2011)

From the Back Cover

MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing.



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